MAE EB3 | Mechanical and Aerospace Engineering MAE EB3 | Mechanical and Aerospace Engineering

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MAE EB3

April 2016

Shrink Polymer M/NEMS: Manufacturing from Micro to Nano

April 8, 2016 @ 11:30 am - 12:30 pm

Abstract: Polymer shrinkage becomes a new approach to do lithography and generate smaller structures by reforming larger pre-patterned structures. The facile polymer fabrication approach by embossing and thermoplastic shrinkage aims to do lithography in a nanoscale or reduce the feature size and dramatically increase the aspect ratio of imprinted microstructures. The shrinkage capability of embossed microstructures is reserved by molding at low temperatures for less cycle time. Embossed patterns are activated for shrinkage by removing projected structures and heating at…

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