Fall 2011 - Dr. Zhu

Note:
1) Please include the course number (MAE 536) in the subject line of any class-related emails sent to the instructor.
2) This course is also offered through NC State Distance Education.

Instructor         Yong Zhu (yong_zhu@ncsu.edu)
Class                 TTh 12:50-2:05pm, EB III 2213
Office Hours     TTh 2:05-3:05pm (in-class), 3:05-4:00pm (DE), EB III 3238
TA                     Qingquan Qin (qqin@ncsu.edu)
Office Hours     MW 1:00-2:00pm, EB III 3315

Course Syllabus
Fall 2011 (pdf)

Reading Materis
Lecture #1: Introduction - Notes (PDF)
          There is Plenty of Room at the Bottom - PDF
          Silicon as a Mechanical Material - PDF
          Moore's Law - PDF
          Failure Mechanisms in MEMS - PDF
Lecture #2: Scaling Laws - Notes (PDF)
          Microrobots and Micromechanical Systems - PDF
Lecture #3: Overview of Microfabrication - Notes (PDF)
Lecture #4: Bulk Micromachining- Notes (PDF)
Lecture #5: Surface Micromachining - Notes (PDF)
Lecture #6: Review on Electric and Mechanical Concepts - Notes (PDF)
Lecture #7: Electrostatic Actuation and Sensing - Notes (PDF), Accelerometer Notes (PDF)
Lecture #8: Piezoresistive Sensing - Notes (PDF)
Lecture #9: Piezoelectricity - Notes (PDF)
Lecture #10: Thermal Actuation and Sensing - Notes (PDF)
Lecture #11: Mechanical Testing of MEMS/NEMS - Notes (PDF)
Lecture #12: Microfluidics - Notes (PDF)
Lecture #13: Nanostructures: Synthesis and Properties - Notes (PDF)
Lecture #14: Nanostructures: Devices - Notes (PDF)

Previous Final Projects (selected)
R. Zeller-Townson and H. Zhao, "A novel neuromorphic micro robotic neural probe" - PDF, PPT
K. Tiruthani, "Energy harvesting using micro and nano structures" - PDF, PPT