MAE 536: Micro and Nano ElectroMechanical Systems

Fall 2012 - Dr. Yong Zhu

1) Please include the course number (MAE 536) in the subject line of any class-related emails sent to the instructor.
2) This course is also offered through NC State Distance Education.

Instructor         Yong Zhu (
Class                 TTh 11:05am-12:30pm, EB III 2213
Office Hours     TTh 2-3PM, EB III 3238
TA                     Shanshan Yao (
Office Hours     M/W 9:30-10:30AM

Course Syllabus
Fall 2013 (pdf)

Lecture Notes and Reading Materials

Lecture #1: Introduction - Notes (PDF)
          There is Plenty of Room at the Bottom - PDF
          Silicon as a Mechanical Material - PDF
          Moore's Law - PDF
          Failure Mechanisms in MEMS - PDF
Lecture #2: Scaling Laws & Overview of Microfabrication- Notes (PDF)
          Microrobots and Micromechanical Systems - PDF
Lecture #3: Review on Electric and Mechanical Concepts - Notes (PDF) 
Lecture #4: Electrostatic Actuation and Sensing - Notes (PDF)
Lecture #5: Piezoresistive Sensing - Notes (PDF)
Lecture #6: Piezoelectricity - Notes (PDF)
Lecture #7: Thermal Actuation and Sensing - Notes (PDF)
Lecture #8: Magnetic Actuation - Notes (PDF)
Lecture #9: Bulk Micromachining - Notes (PDF)
Lecture #10: Surface Micromachining - Notes (PDF)
Lecture #11: Mechanical Behavior of MEMS/NEMS - Notes (PDF)
Lecture #12: Nanostructures: Synthesis and Properties - Notes (PDF)
Lecture #13: Nanostructures: Devices - Notes (PDF)