Fall 2009 - Dr. Zhu

Note: Please include the course number (MAE 589M) in the subject line of any class-related emails sent to the instructor.

Course Syllabus
Fall 2009 (pdf)

Reading Materis
Lecture #1: Introduction - Notes (PDF)
          There is Plenty of Room at the Bottom - PDF
          Silicon as a Mechanical Material - PDF
          Moore's Law - PDF
          Failure Mechanisms in MEMS - PDF
Lecture #2: Scaling Laws - Notes (PDF)
          Microrobots and Micromechanical Systems - PDF
Lecture #3: Overview of Microfabrication - Notes (PDF)
Lecture #4: Bulk Micromachining- Notes (PDF)
Lecture #5: Surface Micromachining - Notes (PDF)
Lecture #6: Review on Electric and Mechanical Concepts - Notes (PDF)
Lecture #7: Electrostatic Actuation and Sensing - Notes (PDF)
Lecture #8: Piezoresistive Sensing - Notes (PDF)
Lecture #9: Piezoelectricity - Notes (PDF)
Lecture #10: Thermal Actuation and Sensing - Notes (PDF)
Lecture #11: Mechanical Testing of MEMS/NEMS - Notes (PDF)
Lecture #12: Microfluidics - Notes (PDF)
Lecture #13: Nanostructures: Synthesis and Properties - Notes (PDF)
Lecture #14: Nanostructures: Devices - Notes (PDF)

Assignments
HW #1 (Due Sep 17) - PDF, HW #1 solutions
HW #2 (Due Oct 1) - PDF, HW #2 solutions

Final Projects - Fall 2008 (selected)
R. Zeller-Townson and H. Zhao, "A novel neuromorphic micro robotic neural probe" - PDF, PPT
K. Tiruthani, "Energy harvesting using micro and nano structures" - PDF, PPT